The lead time for ASML's latest immersion system, the NXT:1950i, has been extended to almost 12 months, prompting some Taiwan-based DRAM makers to switch to alternative products, according to industry sources.
The sources speculated that Elpida Memory's DRAM partners, which include Powerchip Technology, Rexchip Electronics and ProMOS Technologies, have acquired ASML's older-generation immersion scanners due to a longer wait. The average cost of ASML's XT systems is 20% cheaper than the NXT ones, though the former only provides single-exposure manufacturing down to 38nm, the sources said.
In order to deliver 30nm-class products, these DRAM makers will still need to upgrade their immersion equipment, the sources pointed out.
The sources added that Nanya Technology and Inotera Memories already took delivery of NXT scanners from ASML, which will help them migrate to 30nm ahead of other Taiwan-based DRAM makers.
ASML had shipped five NXT systems, and another 17 units in backlog as of December 31, 2009, according to the company. It landed orders of 15 NXT systems in the second quarter, and had 38 units in backlog at the end of the quarter.